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Conductivty
The figure below shows conductivty data of some typical amorphous silicon films.
Sputtered material shows fairly high conductivty whereas PE-CVD material is several
orders of magnitude below. In this type of plot, activated processes are identified
by linear characteristics which is more or less the case for PE-CVD material at high
temperatures. In fact, LeComber's data show a transition between two different
activation energies, and a region at very low temperatures where the data levels
off into a flat part.
Arhenius plot of conductivity data of amorphous silicon. The full triangles
correspond to sputtered material [Brodsky-1972jncs], open symbols are from
PE-CVD material (circles: [LeComber-1970prl, LeComber-1972jncs), squares: author's data)
The conductivity of the PE-CVD samples shows a very different behaviour with
several different regions. Different aspects of charge transport have been discussed
by LeComber in a detailed publication, concluding the following [LeComber-1970prl]:
- Between room temperature and 180°C (450 K), the characteristic
is fairly linear; its slope corresponds to an activation energy around 0.8 eV.
The behaviour suggests conduction by charge carriers that are thermally activated
across the band gap. In this range amorphous silicon behaves quite like a crystalline
semiconductor with a gap of forbidden states. With the additional measurement of an optical
band gap of about 1.7 eV, we conclude that the conduction is that of an
(almost) intrinsic semiconductor. LeComber concludes the same transport mechanism
for their samples from room temperature down to 250 K, but probably their samples show
some n-type behaviour with a Fermi level at 0.6 eV below the
conduction band (see their nominally undoped samples in the doping diagram below).
- In the intermediate region between 250 and 200 K, free charge carriers in the bands become
less probable, but some of the charge carries trapped into states close to the band edges
may be excited and re-trapped. Conductivity will therefore depend on the location of the trapping levels.
LeCombers model is based on a state a well defined energy 0.2 eV below the conduction band.
The concept of a single state has later been abandoned in favour of a distribution of states
whose density tails off expnentially into the bands [Tiedje-1981prl].
- The flatter part at temperatures below resembles the transport in the
sputtered sample, only he density of deep trap states is much reduced in PE-CVD
material. In this region thermal excitation does not take place into the bands any more,
but only into neighbouring trap levels.
- At yet lower temperature, hopping into neighbouring states with higher energy becomes
less and less probable. Eventually, it might become less probable than tunneling into states
further away but at the same energy. This process is called variable range hopping with
a temperature dependence as follows [Mott-1968jncs]:
The quantities σ0 and T0 contain the density
of defect states and the average distance to states that the
carriers can hop into. The theory has been used for explaining a variety of
experimental observations with sputtered samples like the one shown in the diagram,
but there are also cases where the underlying approximations are stretched too far
and the and the density of defects is predicted to be in the range of
1031 cm-3 [Brodsky-1972jncs].
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