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Conductivty

The figure below shows conductivty data of some typical amorphous silicon films. Sputtered material shows fairly high conductivty whereas PE-CVD material is several orders of magnitude below. In this type of plot, activated processes are identified by linear characteristics which is more or less the case for PE-CVD material at high temperatures. In fact, LeComber's data show a transition between two different activation energies, and a region at very low temperatures where the data levels off into a flat part.

Arhenius plot of conductivity data of amorphous silicon. The full triangles correspond to sputtered material [Brodsky-1972jncs], open symbols are from PE-CVD material (circles: [LeComber-1970prl, LeComber-1972jncs), squares: author's data)


The conductivity of the PE-CVD samples shows a very different behaviour with several different regions. Different aspects of charge transport have been discussed by LeComber in a detailed publication, concluding the following [LeComber-1970prl]:


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